Able to meet the cathode voltage and power requirements for dc magnetron sputtering sources, the 600-W EK Series and 1.2-kW EQ Series with sputtering option provide from 0 to 800 W at 750 mA or 1.5 A, ...
The laboratory sputtering systems Z400 and Z400neo (Systec SVS vacuum coatings, Karlstadt, Germany) have 2 sources with HF, DC or pulsed power supply (100W to 3000 W), BIAS voltage on the substrate, ...
Sputtering is a well-known physical vapor deposition (PVD) method finding use in several product applications. While commercial sputter systems are designed for large scale production volume of proven ...
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